Pb(Mg,Nb)O3–PbTiO3 thick films on metalized low-temperature co-fired ceramic substrates

Hana Uršič, Andreja Bencan, Evgeniya Khomyakova, Silvo Drnovsek, Ionel Florinel Mercioniu, Kostja Makarovic, Darko Belavic, Cristina Schreiner, Romeo Ciobanu, Pablo Fanjul Bolado, Barbara Malic


Compatibility of screen-printed piezoelectric 0.65Pb(Mg1/3Nb2/3)O3–0.35PbTiO3 thick films with metalized low-temperature co-fired (LTCC) ceramic substrates is examined. Such substrates are interesting for micro-electro mechanical systems, for example for piezoelectric sensors and actuators, where functional layers are usually Pb-based piezoelectrics. In this study the special attention is given to the influence of the Au, Ag and Ag/Pd electrode materials coated over the LTCC on the functional properties of the films. The best phase purity, dielectric and piezoelectric properties were obtained in the films on gilded substrates.No secondary phases were observed at the film/Au interface by scanning electron microscope. The piezoelectric coefficient d33 of the films on gilded substrates is equal to 120 pC/N.


PMN-PT; relaxor-ferroelectric; thick film; piezoelectric; domain structure

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