Temporary Bonding Using Paper Inserted PPC Layer

zhiyuan zhu


Temporary bonding using paper inserted polypropylene carbonate (PPC) layer is demonstrated. The inserted paper layer can absorb photo acid generator (PAG)-induced acid and protect the substrate. Large improvements of bonding strength are achieved using paper inserted PPC layer. Especially, the bonding strength is much higher than that of PPC/PAG-PPC bonding for tissue paper. The results show that the paper fibers can absorb decomposed PPC and PAG-induced acid, thus protecting the substrate.

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DOI: https://doi.org/10.33180/InfMIDEM2018.403


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